EMI Audit
Maximize uptime with an EMI tool vulnerability report.
ESD-induced electromagnetic interference (EMI)can be an invisible killer in your automated fab, leading to tool lockup and expensive downtime. Ion Professional Services engineers and technicians use digital oscilloscopes and spectrum analyzers in conjunction with electrostatic field-meters and other equipment to evaluate both radiated and conducted EMI influences on tools and processes. Using these results, Ion Professional Services makes suggestions on techniques to address and mitigate EMI in your tools.
General Environmental Characterization
Many problems such as robotic lockup, quality control software errors, reticle, wafer, AMR/GMR and test-head damage can often be solved through analyzing ambient signal levels in manufacturing spaces and around specific workstations. Evaluation of signal amplitudes and frequencies as related to interference susceptibility levels can provide guidance for cost-effective remediation programs.
Sensor Integration
In addition, we are also able to recommend and assist in the application integration of a variety of RFI and EMI sensors for continuous monitoring programs or periodic verification for critical manufacturing processes. Applications range from single-sensor point-of-use to networkable multi-sensor arrays capable of monitoring emissions and transients for entire processes.
Power Quality Investigation
Through the use of power quality oscilloscopes, evaluations of current and voltage distortion or transients as they relate to equipment problems can be conducted. Noise coupling and improper grounding are among the conditions that can also contribute to process problems as well as the inability to qualify new generations of tools in critical manufacturing facilities.
Need help?
Contact an Application Specialist, Sales Services, or Technical Support by sending an email to MKS, Ion Systems or call 800-367-2452 or 510-217-0600.
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