MKS Service & Repair Centers
800-227-8766
978-284-4000 (outside the USA),
877-464-2789 (24/7 technical assistance in the USA)
mks@mksinst.com
Locate a service center near you . . .
ASTeX® Products
United States
MKS Instruments, ASTeX® Products
90 Industrial Way
Wilmington, Massachusetts 01887
USA
Tel: 978-284-4000
Fax: 978-284-4605
Email: rhonda_zuill@mksinst.com
MKS Instruments, ASTeX® Products
4975 North 30th Street
Colorado Springs, Colorado 80919
USA
Tel: 719-260-1191
Fax: 719-260-0395
Email: khalbert@astex.mksinst.com
Germany
MKS Instruments, ASTeX® Products
ASTeX GmbH
Wattstrasse 11-13, D-13355
Berlin
Germany
Tel: 49-30-464-0030
Fax: 49-30-464-00313
Email: eoehme@astex.mksinst.com
Japan
MKS Instruments, ASTeX® Products
1-21-15 Aoyagi Kunitachi
Tokyo 186-0013
Japan
Tel: 81-425-22-9011
Fax: 81-425-22-2636
Email: katsumasa_ito@mksinst.com
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Baratron®, Calstand®, Mass-Flo®, & PICO® Products
United States
MKS Instruments
90 Industrial Way
Wilmington, Massachusetts 01887
USA
Tel: 978-284-4000
Fax: 978-284-4303
Email: Donna_West@mksinst.com
MKS Instruments
789 Grove Road, Suite 111
Richardson, Texas 75081
USA
Tel: 972-231-0173
Fax: 972-437-4127
Email: joe_tran@mksinst.com
Canada
CAPT (Canada Analytical & Process Technologies)
16 Concourse Gate, Suite 400
Ottawa,Ontario
K2E 7S8
Tel: 613-226-1115
Fax: 613-226-5429
Toll Free (Canada only): 866-384-3666
E-mail: bshurben@ca-pt.com
France
MKS Instruments France s.a.
43, Rue du Commandant Rolland
B.P. 41
F-93352 Le Bourget, Cedex
France
Tel: 33-1-48-35-39-39
Fax: 33-1-48-35-32-51
Email: pascal_soncini@mksinst.com
Germany
MKS Instruments Deutschland GmbH
Schatzbogen 43
D-81829 Muenchen
Germany
Tel: 49-89-420008-0
Fax: 49-89-420008177
Email: alfred.schubert@mksinst.com
MKS Instruments Deutschland GmbH
Zur Wetterwarte 50
D-01109 Dresden
Germany
Tel: 49-351-8903819
Fax: 49-351-8903820
Email: alfred.schubert@mksinst.com
Israel
Israel Scientific Instruments, Ltd.
POB 7790
Petah-Tikva 49170
Israel
Tel: 972-3-9232202
Fax: 972-3-9229750
Email: isi@isil.co.il
Italy
G. Gambetti Kenologia Srl.
Via A. Volta No. 27
20082 Binasco (MI)
Italy
Tel: 39-2-90093082
Fax: 39-2-905.2778
Email: alessandro.zanolin@gambetti.it
Japan
MKS Japan, Inc.
Harmonize Building
5-17-13, Narita-higashi
Suginami-Ku
Tokyo 166
Japan
Tel: 81-3-3398-8947
Fax: 81-3-3398-8984
Email: Akihiro_Obara@mksinst.com
Korea
MKS Korea Co., Ltd.
257-4 Yangjae-dong
Seocho-ku
Seoul, 137-130
Korea
Tel: 82-2-529-0713
Fax: 82-2-529-0715
Email: HSPark@mksinst.com
Peoples Republic of China
Silicon International Inc.
Unit 4B, 8 Zun Yi South Road
Jin Min Building
Shanghai
P.R., China 200335
Tel: 86-21-6270-1769
Fax: 86-21-6219-1185
Email: jimshao@online.sh.cn
Singapore
MKS Instruments, Inc. Singapore
Blk 4010 Techplace I
#01-08/09 Ang Mo Kio Avenue 10
Singapore 569626
Tel: 65-483-3986
Fax: 65-483-0089
Email: ongbh@mksinst.com.sg
Taiwan
MKS Instruments Inc. Taiwan
2F, No. 47, Ln 2, Sec 2, Kuang Fu Rd.
Hsinchu 300
Taiwan, R.O.C.
Tel: 886-3-575-3040
Fax: 886-3-575-3048
Email: wwei@mksinst.com
United Kingdom
MKS Instruments, U.K. Ltd.
1 Anchorage Court
Caspian Road
Altrincham, Cheshire
WA14 5HH
United Kingdom
Tel: 44-161-929-5500
Fax: 44-161-929-5511
Email: ian-barrow@mksinst.com
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Control & Information Technology, (including D.I.P.™ and TeNTA) Products
MKS Instruments
70 Rio Robles Drive
San Jose, CA 95134
Toll Free: 800-428-9401
Tel: 408-750-0300
Fax: 408-750-2990
Email: mks@mksinst.com
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ENI® Products
United States
MKS Instruments, ENI® Products
100 Highpower Road
Rochester, New York 14623
USA
Tel: 585-427-8300
Fax: 585-427-7839
Email: Dan_Ewing@mksinst.com
Germany
MKS Instruments, ENI® Products
Echterdinger Str. 57
70794 Filderstadt
Germany
Tel: 49-711-947700
Fax: 49-711-9477025
Email: thomas_horn@mksinst.com
Japan
MKS Instruments, ENI® Products
1-21-15 Aoyagi Kunitachi
Tokyo 186-0013
Japan
Tel: 81-425-22-9011
Fax: 81-425-22-2636
Email: Hiroaki_Suzuki@mksinst.com
Taiwan
MKS Instruments, ENI® Products
No. 49-1, Lane 2, Sec. 2
Kuang-Fu Road
Hsinchu 300
Taiwan
Republic of China
Tel: 886-3-575-1199
Fax: 886-3-575-1022
Email: WWei@mksinst.com
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HPS® Products
MKS Instruments, Vacuum Products Group
5330 Sterling Drive
Boulder, Colorado 80301
USA
Tel: 303-449-9861
Fax: 303-442-6880
Email: Raul_Taibo@mksinst.com
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On-Line™ Products
MKS Instruments, On-Line™ Products
651 Lowell Street
Methuen, MA 01855
Tel: 978-284-4000
Fax: 978-284-4303
Email: mks@mksinst.com
MKS Instruments, ENI Products
Echterdinger Str. 57
70794 Filderstadt
Germany
Tel: 49-711-947700
Fax: 49-711-9477025
Email: thomas_horn@mksinst.com
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Spectra™ Products
MKS Instruments, Spectra™ Products
70 Rio Robles Drive
San Jose, CA 95134
Toll Free: 800-428-9401
Tel: 408-750-0300
Fax: 408-750-2990
Email: al_lew@mksinst.com
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Control & Information Technology, TeNTA™ Products
MKS Instruments
70 Rio Robles Drive
San Jose, CA 95134
Toll Free: 800-428-9401
Tel: 408-750-0300
Fax: 408-750-2990
Email: mks@mksinst.com
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MKS, Ion Systems
AeroBars, QuadBars, Blowers, Ceiling Emitters, In-Line Ionizers
MKS, Ion Systems
1750 North Loop Road
Alameda, CA 94502
Tel: 510-217-0600
Toll-Free: 800-367-2452
Fax: 510-217-0484
Email: salesservices@ion.com
locate a local Ion Systems field service office here.
MKS, Ion Industrial Products
Virtual AC components, Charging Bars and Electrostatic Field Meters
MKS, Ion Industrial
1000 Old County Circle, Unit 116
Windsor Locks, CT 06096
Tel: 888-310-3334
Fax: 860-292-6807
Email: industrial@ion.com
MKS, Ion Industrial Europe
Marie Curie Strasse 8
D-79539 Loerrach, Germany
Tel: 49 (0) 7621-5500 355
Fax: 49 (0) 7621-5500 360
indeuro@ion.com
Download "Calibration Services", from MKS Instruments.
Learn more about MKS Comprehensive Customer Care Programs.
Need more help?
Contact an MKS Service Specialist by sending an email to MKS or call:
800-227-8766
978-284-4000 (outside the USA),
877-464-2789 (24/7 technical assistance in the USA).