Types M330B and M330-WR
9-pin Type "D"
|
Pin
|
Description
|
| 1 |
Valve Open/Close:
Connect -15V to Close
Connect +15V to Open |
| 2 |
Flow Signal Output |
| 3 |
+15VDC |
| 4 |
Power Common |
| 5 |
-15VDC |
| 6 |
Set Point Input |
| 7 |
Signal Common |
| 8 |
Signal Common |
| 9 |
MKS Test Point, Valve Monitor |
15-pin Type "D"
|
Pin
|
Description
|
| 1 |
MKS Test Point, Valve Monitor |
| 2 |
Flow Signal Output |
| 3 |
Valve Close, Connect to Common |
| 4 |
Valve Open, Connect to Common |
| 5 |
Power Supply Common |
| 6 |
-15VDC |
| 7 |
+15VDC |
| 8 |
Set Point Input |
| 9 |
Device Connection Reserved |
| 10 |
Optional Input* |
| 11 |
Signal Common |
| 12 |
Signal Common |
| 13 |
Device Connection Reserved |
| 14 |
Device Connection Reserved |
| 15 |
Chassis Ground |
|
* Pressure signal input for closed loop pressure control.
|
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Note:
This information is subject to change without notice.
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